Show simple item record

dc.contributor.authorMaxwell, Graeme Dunlopen
dc.date.accessioned2016-03-01T11:39:05Z
dc.date.available2016-03-01T11:39:05Z
dc.date.issued1987en
dc.identifier.urihttp://hdl.handle.net/1842/15296
dc.description.abstracten
dc.publisherThe University of Edinburghen
dc.subjectKB thesis scanning project 2015en
dc.titleCharacterisation and performance of optical lithography systemsen
dc.typeThesis or Dissertationen
dc.type.qualificationlevelDoctoralen
dc.type.qualificationnamePhD Doctor of Philosophyen


Files in this item

This item appears in the following Collection(s)

Show simple item record